Large areas elemental mapping by ion beam analysis techniques
نویسندگان
چکیده
منابع مشابه
Elemental thin film depth profiles by ion beam analysis using simulated annealing—a new tool
Rutherford backscattering spectrometry (RBS) and related techniques have long been used to determine the elemental depth profiles in films a few nanometres to a few microns thick. However, although obtaining spectra is very easy, solving the inverse problem of extracting the depth profiles from the spectra is not possible analytically except for special cases. It is because these special cases ...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2015
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/630/1/012016